INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 177)

MDC-370 DEPOSITION CONTROLLER
14.7 SENSOR SETUP
Sensor #
 1  2  3  4
Number of Crystals
 1  2  3  4
 5  6  7  8
Shutter Relay Type
 N.O.  N.C.  DUAL
Control
 MANUAL  DIRECT
 BCD  INDIV.
Drive
 UP  DOWN  FAST  INLINE
 SNGL STEP  DBL STEP
Feedback Type
 NO FEEDBACK  INDIVIDUAL
 BCD  SINGLE HOME  IN POSITION
Rotator Delay (sec)
14.8 SOURCE SETUP
Source #
 1  2  3  4
Number of Pockets
 1  2  3  4
 5  6  7  8
Shutter Relay Type
 N.O.  N.C.
Shutter Delay (sec)
Control
 MANUAL  DIRECT
 BCD  INDIV.
Drive
 UP  DOWN  FAST  INLINE
 SNGL STEP  DBL STEP
Feedback Type
 NO FEEDBACK  INDIVIDUAL
 BCD  SINGLE HOME  IN POSITION
Rotator Delay (sec)
Source Voltage
 2.5V  5V  10V
SYSTEM: ENTERED BY: APPROVED BY: DATE: