3 sensor oscillator – INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 114

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MDC-370 DEPOSITION CONTROLLER

Use a shutter to shield the sensor during initial soak periods to protect the crystal
from any sputtering that may occur. If a small droplet of molten material hits the
crystal, the crystal may be damaged and oscillation may cease.

9.3

SENSOR OSCILLATOR

The sensor oscillator, Figure 9-2, is designed to be used with industry standard 6
megahertz sensor crystals. The oscillator’s characteristics enable it to obtain
maximum life from the sensor crystal.

The oscillator is supplied with a 6” coaxial cable and a 10’ coaxial cable. The 6”
cable interconnects the oscillator and the feedthrough. The 10’ cable
interconnects the oscillator and the MDC-370. This single coaxial cable provides
both power for the oscillator and the signal output for the controller. Cables of
any length are available upon request for replacing the 10’ cable. A schematic of
the oscillator is shown on Figure 9-1.

SYSTEM INSTALLATION

9-2

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