INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 115)

MDC-370 DEPOSITION CONTROLLER
9.3.1 INSTALLATION
Connect one end of the 10-foot oscillator cable to the BNC connector on the
appropriate source-sensor board at the rear of the MDC-370. Connect the other
end of the cable to the oscillator with the arrow pointed toward the sensor head.
The oscillator connects to the feedthrough leading into the vacuum chamber using
a 6 in. cable.
CAUTION
Always use the cables supplied by Maxtek to make the connections.
Failure to make this connection correctly
will create a mismatch in the impedance
of the oscillator circuit.
9.4 INSTRUMENTATION FEEDTHROUGH
A 1 inch diameter, O-Ring sealed feedthrough (IF-111, Figure 9-3) or a 2-3/4 inch
Conflat® flange seal are available with 1/8 inch source and return water cooling
lines, and internal and external coaxial cable connectors. Base plate thickness up
to one inch can be accommodated.
RF interference and free electrons are effectively shielded from the signal
connector through the use of fully closed coaxial cable connections. A standard
coaxial cable with a Microdot® S-50 connector mates the internal feedthrough
connector to the sensor head. The feedthrough has a standard BNC connector for
the coaxial connection to the sensor oscillator.
9.5 SENSOR CRYSTAL REPLACEMENT
The Sensor Head is especially designed for easy sensor crystal replacement and
reliable operation. The crystal lies in a drawer that slides into the sensor housing.
Pull the drawer straight out of the sensor housing by gripping the drawer’s edges
between thumb and forefinger. With the drawer removed, pull straight up on the
retainer spring clip and shake out the spent crystal. Drop a new crystal into the
drawer with the full electrode side down and the pattern electrode side up. Make
sure the crystal is properly seated in the bottom of the drawer. Install the retainer
clip by gently pressing it onto the drawer. The retainer clip should snap into the
drawer. All three retaining legs must be fully engaged onto the drawer housing.
Replace the drawer into the sensor housing. The drawer should slide in easily and
snap into place.
Removal and replacement of sensor crystals should be performed in a clean
environment. An isolated clean workbench is recommended for crystal
replacement. To prevent crystal contamination, use clean lab gloves or plastic
tweezers when handling the crystal and keep the new crystals in a closed plastic
case. When handling the drawer always hold it by the edges to avoid touching the
crystal surface.
SYSTEM INSTALLATION 9-3