INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 11)

MDC-370 DEPOSITION CONTROLLER
1. GENERAL DESCRIPTION
1.1 PURPOSE
The MDC-370 is a full-featured deposition controller which can provide
automatic control of single or multi-layer film deposition in either a production or
development environment. The MDC-370 will improved predictability and
repeatability of deposited film characteristics through dependable digital control
and multi-sensor averaging.
The MDC-370 makes programming and operation easy with large LED displays
for important run-time values, a graphic LCD display for graphs of rate, rate
deviation, thickness and deposit power, an easy to use menu-driven user interface
providing unparalleled access to plain English programming of processes,
materials, inputs and outputs.
1.2 FEATURES
The MDC-370 incorporates numerous features which are economically justifiable
as a result of rapid advances in semiconductor technology and the advent of low
cost microprocessors.
1.2.1 MULTI-CRYSTAL AVERAGING
The MDC-370 provides greater accuracy in thin film deposition by averaging up
to six sensors distributed throughout the chamber to account for changes in vapor
distribution during deposition.
1.2.2 EXTENSIVE PROGRAM STORAGE
The MDC-370 is capable of storing up to 99 processes, 999 layer definitions and
32 complete material definitions. Once a program is entered it will be maintained
in memory for a minimum of 5 years without external power.
1.2.3 DYNAMIC MEASUREMENT UPDATE RATE
Measurement is dynamically adjusted from 0.5 to 10 Hz for optimum resolution
and control.
1.2.4 SUPERIOR GRAPHICS DISPLAY
The MDC-370 features a 256x64 pixel LCD graphics display allowing real time
graphing of important process information such as rate, rate deviation, thickness
and power.
1.2.5 PROGRAM SECURITY
To assure the integrity of stored programs, the MDC-370 incorporates edit
passwords to guard against unauthorized program changes.
1.2.6 DESIGNED FOR UNATTENDED OPERATION
The MDC-370 has been designed for truly automatic operation and toward this
end incorporates extensive internal monitoring and overriding abort circuitry to
GENERAL DESCRIPTION 1-1