INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 42)

MDC-370 DEPOSITION CONTROLLER
The following are a few examples of some typical uses for the MDC-370’s
programmable I/O’s and actions.
Optical Monitor Termination - To setup the MDC-370 to terminate the
deposit on a signal from an optical monitor, the first step is to program an
input that will be connected to an output in the optical monitor. Go to the
Program Inputs screen and select a blank input. Name the input “Optical
Monitor” for future identification. Note the I/O card and the pin numbers
of the input so you can later connect the input to the optical monitor.
Next, go to the Program Actions screen and select any action labeled “No
Action”. Press the right arrow key with the cursor on the action Name
parameter and select the TerminateDeposit action. Move the cursor to the
Conditions field and press the 0 key to add a condition. Move the cursor
down to the Input condition type, press the right arrow key, move the
cursor onto the “Optical Monitor” input and press enter. Press enter again
to complete the condition string.
Now, the MDC-370 will terminate the deposit whenever the “Optical
Monitor” input is set true by the optical monitor.
Substrate Heat Control - To create an output in the MDC-370 to switch on
and off a substrate heat controller, first go to the Program Outputs screen
and select a blank output. Name the output “Substrate Heat” for future
identification. Note the I/O card number and the pin numbers of the
output so you can later connect the output to the substrate heater
controller.
Next, move the cursor onto the Conditions field and press the 0 key to add
a condition. With the cursor on the State condition type, press the right
arrow key and select the state in which you would like the heater to first
turn on. If you would like the heater on during more than the one state,
then press the 5 key to add an or “|” symbol then press 0 to add the next
desired state. Repeat this process until all of the states requiring substrate
heat have been added to the condition. For example, if you would like
substrate heat to start in the Predeposit Hold state and continue through the
Deposit 1 state then your condition string would look like this “Predeposit
Hold|Deposit 1”.
With the condition string completed, the MDC-370 will set this output true
whenever it is in one of the selected states.
4.2.6 DISPLAY SETUP
The only parameter in the Display Setup menu that affects the controller’s
function is the Pause On Layer Complete parameter. This parameter determines
whether or not the controller will pause at the completion of each layer. When set
to Yes, the controller will stop at the end of each layer and wait for a Start key
press before continuing. When set to No, the controller will immediately go to
the next layer.
PROGRAMMING AND CONTROLLER SETUP 4-10