INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 49)

MDC-370 DEPOSITION CONTROLLER
Figure 4-6 Define Material screen
1. Material Name (A ten character material name)
The material name parameter allows you to either use the keypad to type in a
name, or pick a name from the materials already stored in the material library.
To pick a material from the material library, move the cursor to the material
parameter and press the Right-arrow key. This will display a complete list of
materials that are stored in the MDC-370. To pick a material, move the cursor
onto that material and press Enter key. Once a material is chosen, the stored
values for the density and acoustic impedance for that material are automatically
entered into their respective parameters.
2. Source# (1 to 6)
This parameter defines the source output number that will be used for this
material, and cannot be greater than the number of source outputs fitted to the
controller. The default setting is 1.
3. Pocket# (1 to 8)
This parameter defines the pocket number that contains this material. This
parameter cannot be greater than the Number Of Pockets parameter in the Source
Setup screen. The default setting is 1.
4. Density (0.80 to 99.99 gm/cm
3
)
This parameter provides the material density so that the controller can calculate
and display the physical film thickness. If the film density is known it should be
used. A list of the more commonly used film densities is presented in Table 10-1.
As a first approximation, bulk material density can be used in programming.
Empirical calibration of this parameter is described in Section 10.6.1.
5. Acoustic Impedance (0.50 to 59.99 gm/cm
2
/sec)
This parameter is the acoustic impedance of the material. The acoustic
impedance of the deposited film is required by the MDC-370 in order to
accurately establish the sensor scale factor when the sensor crystal is heavily
loaded. If the acoustic impedance of the film material is known, it can be entered
directly in units of 10
5
gm/cm
2
sec. In most cases the acoustic impedance of the
Material Name: >Cr <
Source 1
Pocket 1
Density 07.20 gm/cm^3
Acoustic Impedance 28.95 gm/cm^2/sec
Tooling Factor 070.0 %
Proportional Gain 1000
Integral Time 99.9
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PROGRAMMING AND CONTROLLER SETUP 4-17