6 edit source setup – INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 70

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MDC-370 DEPOSITION CONTROLLER

Table of Input states for BCD feedback type.

Crystal
number

Input
BCD2

Input
BCD1

Input
BCD0

1

OPEN

OPEN

OPEN

2

OPEN

OPEN

GND

3

OPEN

GND

OPEN

4

OPEN

GND

GND

5

GND

OPEN

OPEN

6

GND

OPEN

GND

7

GND

GND

OPEN

8

GND

GND

GND

SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when crystal one is in position.

IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired crystal is in position.

NO FEEDBACK - No crystal position feedback is used.

6. Rotator Delay (0 to 99 seconds)

This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section.), this parameter tells
the controller how long to wait assuming the crystal is in position. If position
feedback is provided, this parameter tells the controller how long it should wait
for the crystal to reach its target position before it issues a Sensor Fault message.

4.3.3.6 EDIT SOURCE SETUP

Selecting Edit Source Setup will present the Source Setup screen as shown in
Figure 4-12. In this screen you first select the source setup you wish to edit. To
select a source, use the Up-arrow and Down-arrow keys, then press the Right-
arrow or Enter key to select.

PROGRAMMING AND CONTROLLER SETUP

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