INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 16)

MDC-370 DEPOSITION CONTROLLER
1.3.9 SOURCE PARAMETERS
Number of Pockets 1 to 8
Shutter Relay Type Normally open, normally closed, or
none.
Shutter Delay 0.0 to 9.9 sec
Position Control Manual, direct, BCD, or individual.
Position Drive Up, down, Fast, inline, single step, or
double step.
Feedback Type Individual, BCD, single home, in
position, or no feedback.
Rotator Delay 0 to 99 sec
Source Voltage Range 2.5, 5, 10 volts
1.3.10 RECORDER PARAMETERS
Recorder #1/#2 Output Rate, rate dev., power or thickness
Recorder #1/#2 Scale Full scale %, 2/3 digit
1.3.11 UTILITY SETUP PARAMETER
Crystal Frequency 2.5, 3, 5, 6, 9, 10 MHz
Simulate Mode On/Off
Interface Address 1 to 32
Attention Volume 0 to 10
Alert Volume 0 to 10
Alarm Volume 0 to 10
Data Points/Minute 30,60,120,300,600 PPM
Time 0 to 23:59
Date MM/DD/YY
1.3.12 OTHER
Input Power Requirements 100, 120, 200, 240 VAC; 50/60 Hz;
25 watts
Operating Temperature Range 0 to 50
°C
Physical Weight 10 LB
Physical Size 19” rackmount case
3 1/2” high x 9 3/8” deep
GENERAL DESCRIPTION 1-6