INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 62)

MDC-370 DEPOSITION CONTROLLER
4.3.3.3.2 CONDITION TYPES
States - State conditions are evaluated true whenever the controller is in the
respective state. Controller States are:
Process Ready
Start Layer
Change Pocket
Change Crystal
Layer Ready
Soak Rise
Soak Hold
Predeposit Rise
Predeposit Hold
Establish Rate
Deposit 1
Rate Ramp 1
Deposit 2
Rate Ramp 2
Deposit 3
Rate Ramp 3
Deposit 4
Rate Ramp 4
Deposit 5
Ramp To Feed
Feed
Condition Process
Type:
Material
Source
Pocket
Softnode
Sensor
SnsrXtal
Layer Number: >005<
PROGRAMMING AND CONTROLLER SETUP 4-30