INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 156

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MDC-370 DEPOSITION CONTROLLER

All string values are in ASCII format including decimal points and colons where
needed. See send run-time values (Code #30) above for details on the
source/sensors status, controller trouble and controller mode bits.

For example, to instruct the MDC to output rate and power the computer would
send the following message:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(31)+Chr$(6)+Chr$(5)+Chr$(0)+Ch
r$(0)+Chr$(0)+Chr$(0)+Chr$(0)+Chr$(213)

Sending the following message stops data logging:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(31)+Chr$(6)+Chr$(0)+ Chr$(0)+
Chr$(0)+ Chr$(0)+ Chr$(0)+ Chr$(0)+Chr$(218)

33. Internal Command

34. Set Active Source Power (Code #33)

Instructs the controller to enter the incoming source power value into the active
source power. This command only works if the controller is in the manual power
control mode. A description of the manual power parameter list is as follows:

Parameter Name

Length (bytes)

Allowable Range

Source Power

2

(0-999) units are 0.1%

Total 2 bytes

For example, to set the source power to 50% the computer would send the
following message:

Chr$(255)+Chr$(254)+Chr$(1)+Chr$(33)+Chr$(2)+Chr$(1)+Chr$(244)+
Chr$(231)

35. Internal Command

36. Internal Command

37. Send Process Log Directory (Code #36)

Instructs the controller to send the process log directory to the host computer.
This command is only valid on controllers with the internal data log storage
option installed. The process log directory consists of 16 individual process logs.
The data format of a process log is listed in the following table:

Parameter Name

Length (bytes)

Allowable Range

Process Log Name

12

All ASCII Characters

Process Run Number

2

(1-9999)

Starting Time

3

(00:00:00-23:59:59)
HH:MM:SS

Starting Date

3

(01/01/00-12/31/99)
MM:DD:YY

Completion Time

3

(00:00:00-23:59:59)
HH:MM:SS

COMPUTER INTERFACE

11-26

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