INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 51)

MDC-370 DEPOSITION CONTROLLER
This parameter sets the time interval for the source power to ramp up from zero to
the power level set in Soak Power parameter. It should be long enough for the
material to have time to reach equilibrium temperature without spitting, or in the
case of evaporation sources, protected from unnecessary thermal shock.
11. Soak Power (0.0-99.9%)
This parameter defines the source power level during the Soak state. The Soak
Power should be established at a level which will assure that the source material is
properly outgassed and prepared for subsequent deposition.
12. Soak Time (0 to 9:59:59)
The Soak Time parameter defines the time duration of the Soak state. It is used in
conjunction with the Soak Power to allow the material to fully outgas.
13. Rise To Predeposit (0 to 9:59:59)
This parameter sets the time interval for the source power to ramp from Soak
Power level to the Predeposit Power.
14. Predeposit Power (0.0 to 99.9%)
This parameter defines the source power level during the Predeposit state. This
should be set as close as possible to the power level required to reach the desired
deposition rate. The Manual mode can be used to conveniently determine the
Soak and Predeposit power levels of a particular material.
15. Predeposit Time (0 to 9:59:59)
This parameter defines the time duration of the Predeposit state. The Predeposit
Time should be established at a value which allows the source material to be
brought to the deposit temperature level and stabilized in an orderly manner.
Since evaporation will normally occur at the Predeposit power level, too long a
Predeposit Time will result in unnecessary buildup of material on the shutter and
unnecessary material loss.
16. Rate Establish Time (0 to 99 seconds)
This parameter defines the time limit of the rate establish state. The Rate
Establish state occurs before the deposit state and is used to establish the correct
source power before the source shutter is opened. In the rate establish state the
crystal shutter is opened, the source shutter is closed, and the controller is
controlling source power to achieve the programmed rate within the Rate
Establish Error% for a period of 5 seconds. Once the rate has been held within
limit for 5 seconds, the controller will go into the deposit state. If the rate error
cannot be held within the allowed percentage error for 5 seconds, then the
controller will display a Rate Establish Error and the process will be halted.
For the Rate Establish function to work, the sensor must be located somewhere in
the vapor stream of the source while the source shutter is closed. The default
setting for this parameter is 0, which disables this function.
17. Rate Establish Err% (0 to 99%)
PROGRAMMING AND CONTROLLER SETUP 4-19