INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 39)

MDC-370 DEPOSITION CONTROLLER
inputs. With pocket one in position, all inputs will be false. With poctket
four in position, inputs one and two will be true and input three will be
false.
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true
(closed to ground) when pocket one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired pocket is in position.
4.2.4 SENSOR SETUP
The following examples demonstrate how the MDC-370 is setup to control the
four basic types of crystal sensor heads available:
Single Crystal Sensor Head - No sensor parameters need to be changed for a
single crystal sensor head.
Single Crystal Sensor Head with Shutter - For a single shuttered sensor
head, set the Shutter Relay Type parameter to either N.O. (normally open)
or N.C. (normally closed). The typical setting is normally open which
means that the relay will close to open the shutter. A relay output called
“SensorN Shutter” will be created that should be connected between the
sensor shutter actuator and power supply.
Dual Crystal Sensor Head with Shutter - For a dual crystal shuttered sensor
head, set the Shutter Relay Type parameter to Dual. A relay output called
“DualSnsr1&2 Shtr” will be created that should be connected between the
sensor shutter actuator and power supply.
Automatic crystal switching upon failure is enabled in the material menu
by setting the Crystal Fail parameter to Switch and the Backup Sensor
number to 2. Note that with the dual sensor head you define the sensor
number that you would like to use, (or switch too) not the crystal number.
The crystal number need only be defined when you are using a multiple
crystal sensor head (sensor head with one BNC output and more than one
crystal).
Multiple Crystal Sensor Head - The MDC-370 can be setup for either
automatic or manual control of multiple crystal sensor heads.
a. Manual Crystal Position Control - For manual crystal position
control of a multiple crystal sensor head, set the Number of Crystals
parameter to the correct number of crystals. Once set, a message will
appear at the start of each layer instructing the operator to change
sensor N to the required crystal number.
b. Automatic Crystal Position Control - There are two parameters
requiring definition which are common to all the various types of
multiple sensor heads. The first is the Number of Crystals parameter
and the second is the Rotator Delay parameter. The Number of
PROGRAMMING AND CONTROLLER SETUP 4-7