INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 153)

MDC-370 DEPOSITION CONTROLLER
Alarm 2 Errors 1 Bit 1 = No Sensor Enabled for
Material
Bit 2 = Halt Process Action
Bit 3 = Sound Alarm Action
Bit 4 = Rate Deviation Alarm
Bit 5 = Crystal Fail, Time
Power Mode
Bit 6 = Sensor Fault
Bit 7 = Source Fault
Alert Errors 1 Bit 3 = Sound Alert Action
Bit 4 = Minimum Power Alert
Bit 5 = Maximum Power
Alert
Bit 6 = Rate Deviation Alert
Bit 7 = Crystal
Marginal&Deposit
Attention 1 Errors 1 Bit 0 = Process Complete
Bit 1 = Minimum Power
Attention
Bit 2 = Maximum Power
Attention
Bit 3 = Rate Deviation
Attention
Bit 4 = Crystal Marginal&!In
Process
Bit 5 = Crystal Fail&! In
Process
Bit 6 = Crystal Marginal&In
Process, Switch
Bit 7 = Crystal Fail&In
Process, Switch
Attention 2 Errors 1 Bit 1 = Sensor Calibration
Done
Bit 2 = Not Sampling (Sample
Mode)
Bit 3 = Manual Crystal
Change
Bit 4 = Resume Process
Bit 5 = Sound Attention
Bit 6 = Manual Pocket
Change
Bit 7 = Pause on Layer
Complete
Controller Status 1 1 bit 0 = Ready Mode
bit 1 = Manual Mode
bit 2 = Time Power Mode
bit 3 = Hold Mode
COMPUTER INTERFACE 11-23