INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 160
MDC-370 DEPOSITION CONTROLLER
#
Value Description
Len
Format
Units
0
Power
4
String
%
1
Average Thickness
5
String
KÅ
2
Average Rate
4
String
Å/sec
3
Active Crystal Health
2
String
%
4
Layer number
3
String
None
5
Rate deviation
4
String
%
6
Active process number
1
String (0-98)
7
Active material number
1
String (0-31)
8
Active source number
1
String (1-6)
9
Sensor #1 Rate
4
String
Å/sec
10 Sensor #2 Rate
4
String
Å/sec
11 Sensor #3 Rate
4
String
Å/sec
12 Sensor #4 Rate
4
String
Å/sec
13 Sensor #5 Rate
4
String
Å/sec
14 Sensor #6 Rate
4
String
Å/sec
15 Sensor #1 Thickness
5
String
KÅ
16 Sensor #2 Thickness
5
String
KÅ
17 Sensor #3 Thickness
5
String
KÅ
18 Sensor #4 Thickness
5
String
KÅ
19 Sensor #5 Thickness
5
String
KÅ
20 Sensor #6 Thickness
5
String
KÅ
21 Sensor #1-6 Crystal
Position
1x6 String (1-8)
22 Sensor #1 Crystal
Health
2
String (0-99)
%
23 Sensor #2 Crystal
Health
2
String (0-99)
%
24 Sensor #3 Crystal
Health
2
String (0-99)
%
25 Sensor #4 Crystal
Health
2
String (0-99)
%
26 Sensor #5 Crystal
Health
2
String (0-99)
%
27 Sensor #6 Crystal
Health
2
String (0-99)
%
28 Source #1-6 Pocket
Position
1x6 String (1-8)
29 Layer Time To Go
7
String
h:mm:ss
30 State Time To Go
7
String
h:mm:ss
31 Elapsed Process Time
7
String
h:mm:ss
32 Elapsed Layer Time
7
String
h:mm:ss
33 Elapsed State Time
7
String
h:mm:ss
34 Source #1-6 Status
1x6 Bit 0 = Shutter
COMPUTER INTERFACE
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