INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 174)

MDC-370 DEPOSITION CONTROLLER
14.4 INPUTS
Input
#
Input Name True/Logic Card # Pin # Return
Pin #
1
 LOW
 HIGH
2
 LOW
 HIGH
3
 LOW
 HIGH
4
 LOW
 HIGH
5
 LOW
 HIGH
6
 LOW
 HIGH
7
 LOW
 HIGH
8
 LOW
 HIGH
9
 LOW
 HIGH
10
 LOW
 HIGH
11
 LOW
 HIGH
12
 LOW
 HIGH
13
 LOW
 HIGH
14
 LOW
 HIGH
15
 LOW
 HIGH
16
 LOW
 HIGH
SYSTEM: ENTERED BY: APPROVED BY: DATE: