INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 67)

MDC-370 DEPOSITION CONTROLLER
Once the action is selected then you need to establish when the action should take
place by defining its condition string. This is covered in the earlier section called
Entering a Condition String.
Start Timer 1-8 - Start timer#1-8 as the next process to be started by the Start
Process action described above.
4.3.3.5 EDIT SENSOR SETUP
Selecting Edit Sensor Setup will present the Sensor Setup screen shown in Figure
4-11. In this screen you define the sensor parameters that the controller needs to
interface to the various types of sensors. Once the sensor setup is complete, the
controller will create the necessary inputs and outputs needed to interface to the
defined sensors. To define a sensor, first select the sensor number by using the
Up-arrow and Down-arrow keys to position the cursor on the desired sensor
number. Once selected, the sensor is configured by selecting the appropriate
parameters from the right half of the display:
Figure 4-11 Sensor Setup Screen
1. Number of crystals (1 to 8)
This parameter defines the number of crystals available for that sensor input. For
a single sensor head this would be set to one. For a dual sensor head with
separate oscillators and sensor connections, this would still be set to one because
there is only one crystal for each sensor input. For a multiple rotary type sensor
head, this parameter would be set to the number of crystals that the sensor will
hold.
2. Shutter Relay type (N.O., N.C., None, Dual)
This parameter defines the shutter relay type used to control the sensor shutter.
The following four relay types are available:
N.O. - Relay is normally open and closes to close shutter. For this type, a
“SensorN Shutter” output will be created to interface to the shutter actuator.
N.C. - Relay is normally closed and opens to close shutter. For this type, a
“SensorN Shutter” output will be created to interface to the shutter actuator.
Sensor Setup:
Number of Crystals 6
>Sensor #1< Shutter Relay Type N.O.
Sensor #2 Control Manual
Sensor #3 Drive
Up
Sensor #4 Feedback Type No Feedback
Sensor #5 Rotator Delay(sec) 00
Sensor #6
PROGRAMMING AND CONTROLLER SETUP 4-35