INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 71)

MDC-370 DEPOSITION CONTROLLER
Figure 4-12 Source Setup screen
Once selected, the source is configured with the following parameters located on
the right side of the display:
1. Number of Pockets (1 to 8)
This parameter defines the number of pockets, or crucibles, available for the
source. The default value is 1 for a single pocket source.
2. Shutter Relay type (N.O., N.C., None)
This parameter defines the shutter relay type used to control the source shutter.
The following three relay types are available:
N.O. - Relay is normally open and closes to close shutter. For this type, a
“SourceN Shutter” output will be created to interface to the shutter actuator.
N.C. - Relay is normally closed and opens to close shutter. For this type, a
“SourceN Shutter” output will be created to interface to the shutter actuator.
None - No sensor shutter output is created.
3. Shutter Delay (sec) (0.0 to 9.9 seconds)
This parameter defines the amount of time allowed for the source shutter to close.
4. Control (Manual, Direct, BCD, Indv)
This parameter defines the type of pocket control utilized.
Manual, as it implies, means not under control of the MDC-370. Under manual
control, the MDC-370 will stop the process upon the completion of the current
layer when the next layer requires a different pocket. A message prompting the
operator with the material required is displayed in the Parameter/Status window.
Once the pocket has been changed, the process is resumed by pressing the Start
key.
BCD and Indv are used when control is through an external pocket rotation
controller which accepts Binary Coded Decimal inputs or Individual switch
closures to select the pocket. The controller creates the number of outputs
required to interface with the external controller and sets the outputs as required
to signal a pocket change.
Source Setup: Number of Pockets 6
Shutter Relay Type N.O.
>Source #1 Shutter Delay (sec) 0.0
Source #2 Control Direct
Source #3 Drive Up
Source #4 Feedback Type Individual
Source #5 Pocket Delay (sec) 10
Source #6 Source Voltage 10V
PROGRAMMING AND CONTROLLER SETUP 4-39