INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 129
MDC-370 DEPOSITION CONTROLLER
Table 10-1 Material Density and Acoustic Impedance Value
Material
Symbol
Density
Impedance
Aluminum
Al
2.70
8.17
Aluminum Oxide
Al
2
O
3
3.97
26.28
Antimony
Sb
6.62
11.49
Arsenic
As
5.73
9.14
Barium
Ba
3.5
4.20
Beryllium
Be
1.85
16.26
Bismuth
Bi
9.8
11.18
Boron
B
2.54
22.70
Cadmium
Cd
8.64
12.95
Cadmium Sulfide
CdS
4.83
8.66
Cadmium Telluride
CdTe
5.85
9.01
Calcium
Ca
1.55
3.37
Calcium Fluoride
CaF
2
3.18
11.39
Carbon (Diamond)
C
3.52
40.14
Carbon (Graphite)
C
2.25
2.71
Chromium
Cr
7.20
28.95
Cobalt
Co
8.71
25.74
Copper
Cu
8.93
20.21
Copper (I) Sulfide (alpha)
Cu
2
S
5.6
12.80
Copper (I) Sulfide (beta)
Cu
2
S
5.8
13.18
Copper (II) Sulfide
CuS
4.6
10.77
Dysprosium
Dy
8.54
14.72
Erbium
Er
9.05
11.93
Europium
Eu
5.244
----
Gadolinium
Gd
7.89
13.18
Gallium
Ga
5.93
14.89
Gallium Arsenide
GaAs
5.31
5.55
Germanium
Ge
5.35
17.11
Gold
Au
19.30
23.18
Hafnium
Hf
13.09
24.53
Holnium
Ho
8.8
15.2
Indium
In
7.30
10.50
Indium Antimonide
InSb
5.76
11.48
Iridium
Ir
22.40
68.45
Iron
Fe
7.86
25.30
Lanthanum
La
6.17
9.59
Lead
Pb
11.30
7.81
Lead Sulfide
PbS
7.50
15.60
Lithium
Li
0.53
1.50
Lithium Fluoride
LiF
2.64
11.41
Magnesium
Mg
1.74
5.48
Magnesium Fluoride
MgF
2
3.0
13.86
Magnesium Oxide
MgO
3.58
21.48
THEORY OF OPERATION
10-7