INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 85)

MDC-370 DEPOSITION CONTROLLER
levels. The list is arranged in descending order of priority. In the event that more
than one warning level is triggered, the higher level has priority. An asterisk in
the Clear column indicates the warning sound will clear when the condition
clears. Any key press will also clear the sound. The action column indicates
what if any action is taken as a result of the trouble.
Warning
Messages Type Clear Action
Min Rate&Max Power Alarm Abort
Max Rate&Min Power Alarm Abort
System Setup memory corrupted Alarm Halt
Process memory corrupted Alarm Halt
Material memory corrupted Alarm Halt
Rate Est. Error Alarm Halt
Crystal Failure Alarm/Attn NO/* Halt
Source Fault Alarm Halt
Sensor Fault Alarm Halt
No Snsrs Enabled Alarm Halt
Time Power Alarm Time/Power
Rate Dev. Alarm Alarm *
Alarm Action Alarm
Crystal Marginal Alert/Attn NO/*
Rate Dev. Alert Alert *
Max power Alert Alert *
Min power Alert Alert *
Alert Action Alert *
Xtal Fail Switch Attention Crystal
Switch
Xtal Mrgn Switch Attention Crystal
Switch
Rate Dev. Atten Attention *
Max power Attention *
Min power Attention *
Change source # X to (material name)
and press Start to continue. Attention Hold
Change sensor # X to crystal # X
and press Start to continue. Attention Hold
Attention Action Attention *
Press Start to resume process. N/A
Start to continue. Attention * Hold
Calibration Done Attention *
Table 5-1 Trouble Conditions and Warnings
5.10.1 DESCRIPTION
Each of the messages is described below.
OPERATING THE MDC-370 5-9