INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 150)

MDC-370 DEPOSITION CONTROLLER
Bit 7 = System Setup Corrupted
Alarm 2 Errors 1 Bit 1 = No Sensor Enabled for Material
Bit 2 = Halt Process Action
Bit 3 = Sound Alarm Action
Bit 4 = Rate Deviation Alarm
Bit 5 = Crystal Fail, Time Power Mode
Bit 6 = Sensor Fault
Bit 7 = Source Fault
Alert Errors 1 Bit 3 = Sound Alert Action
Bit 4 = Minimum Power Alert
Bit 5 = Maximum Power Alert
Bit 6 = Rate Deviation Alert
Bit 7 = Crystal Marginal&Deposit
Attention 1 Errors 1 Bit 0 = Process Complete
Bit 1 = Minimum Power Attention
Bit 2 = Maximum Power Attention
Bit 3 = Rate Deviation Attention
Bit 4 = Crystal Marginal&!In Process
Bit 5 = Crystal Fail&! In Process
Bit 6 = Crystal Marginal&In Process,
Switch
Bit 7 = Crystal Fail&In Process, Switch
Attention 2 Errors 1 Bit 1 = Sensor Calibration Done
Bit 2 = Not Sampling (Sample Mode)
Bit 3 = Manual Crystal Change
Bit 4 = Resume Process
Bit 5 = Sound Attention
Bit 6 = Manual Pocket Change
Bit 7 = Pause on Layer Complete
Discrete Input Register 1 1 Bit 0 = Input #1, ... (0=False, 1=True)
Discrete Input Register 2 1 Bit 0 = Input #9, ... (0=False, 1=True)
Discrete Output Register 1 1 Bit 0 = Output #1, ... (0=False, 1=True)
Discrete Output Register 2 1 Bit 0 = Output #9, ... (0=False, 1=True)
Controller Status 1 1 bit 0 = Ready Mode
bit 1 = Manual Mode
bit 2 = Time Power Mode
bit 3 = Hold Mode
bit 4 = Halt Mode
bit 5 = Abort Mode
bit 6 = Power Control Mode
bit 7 = In Process
Controller Status 2 1 bit 0 = Resume Process
bit 1 = Simulate Mode
bit 5 = Material Time Setpoint
bit 6 = Backup Sensor Active
bit 7 = Last Layer Of Process
Source #1-6 Pocket 1x6 (1-8)
COMPUTER INTERFACE 11-20