3 ground lug, 4 remote power handset, 5 source-sensor – INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 104: 6 rs-232 communication

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3 ground lug, 4 remote power handset, 5 source-sensor | 6 rs-232 communication | INFICON MDC-370 Thin Film Deposition Controller User Manual | Page 104 / 183

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