1 min rate&max power, 2 max rate&min power, 3 system setup memory corrupted – INFICON MDC-370 Thin Film Deposition Controller User Manual

Page 86: 4 process memory corrupted, 5 material memory corrupted, 6 rate est. error, 7 crystal failure, 8 source fault

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1 min rate&max power, 2 max rate&min power, 3 system setup memory corrupted | 4 process memory corrupted, 5 material memory corrupted, 6 rate est. error, 7 crystal failure, 8 source fault | INFICON MDC-370 Thin Film Deposition Controller User Manual | Page 86 / 183 1 min rate&max power, 2 max rate&min power, 3 system setup memory corrupted | 4 process memory corrupted, 5 material memory corrupted, 6 rate est. error, 7 crystal failure, 8 source fault | INFICON MDC-370 Thin Film Deposition Controller User Manual | Page 86 / 183
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