INFICON IC6 Thin Film Deposition Controller User Manual
Page 103
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PN
07
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50
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P1
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IC6 Operating Manual
SHUTTER OUT . . . . . . . . . . . . . . . . 0 to 38
This parameter designates which of the 38 outputs is to be used to activate the
Crystal Shutter for this sensor. Values range from 0 to 38. Values 1 through 38
correspond to the appropriate output. Value 0 indicates that a shutter is not
used. The default value is 0. If a value other than 0 is entered, the output
chosen as the Crystal Shutter output is designated as such on the Digital I/O
display. The output is set to be true as long as the layer containing the sensor
is in SHUTTER DELAY, DEPOSIT, NON DEPOSIT CONTROL, MANUAL, or in
the Sample period of the RateWatcher function. The condition remains true
until the end of POST DEPOSIT, TIME POWER, and HOLD, or until a STOP
command is received, or during the Hold period of the RateWatcher function.
Auto-Z . . . . . . . . . . . . . . . . . . . . . . . No (0), Yes (1)
This parameter designates the method in which the Z-Ratio value will be
obtained for use in computing thickness with this sensor. No indicates that the
Z-Ratio established in Material Definition is used. Yes indicates that the Auto-Z
calculation feature of the system is used. Auto-Z cannot be enabled on a crystal
which is “unable to Auto-Z”. Refer to
for details on
why a crystal is unable to Auto-Z. The default value is No for the Material
Z-Ratio.
Recorder Settings
OUTPUT. . . . . . . . . . . . . . . . . . . . . . 0 to 12
This parameter designates which of the DAC outputs is to be used as this
sensor’s unfiltered recorder output. Values range from 0 to 12. 0 indicates there
is no DAC used with this sensor. Values 1 through 6 correspond to the six DAC
BNC outputs on the back of the IC6 labeled DAC 1 to DAC 6. DAC outputs 7 to
12 require the optional DAC output card.
FUNCTION. . . . . . . . . . . . . . . . . . . . Rate (0), Thick (1), RateDev (2)
This parameter determines the function of the Sensor’s recorder output.
Default is 0 for the unfiltered sensor rate (Rate Filter Time has no effect).
RANGE . . . . . . . . . . . . . . . . . . . . . . 0 to 99999
The full scale range value selected corresponds to General Parameter DAC
Scale and Polarity. Default is 100.