INFICON IC6 Thin Film Deposition Controller - Manual (Page 67)

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IC6 Operating Manual
3.3.3.4 Sensor Information Type/Freq Display Description
Figure 3-9 Type/Freq display
Sensor
Sensor identifies the sensor channel. Failed sensor numbers appear in red.
Sensor Type
Shows the sensor type configured for the sensor channel.
Z-RATIO
This two-column field displays the type and value of the Z-Ratio being used for
the given sensor. Three Z-Ratio types are possible: Matl, Auto and Sens.
Matl indicates the Z-Ratio being used for thickness calculation is the value
found in the Material parameter Z-Ratio. If the Auto-Z parameter is set to No in
the Sensor menu, the Z-Ratio Type displayed on the Sensor Information screen
will always be Matl.
Auto indicates the Auto-Z parameter in the Sensor menu is set to Yes. Auto-Z
continually calculates the Z-Ratio for the "as deposited" film. If the IC6 suddenly
lost the ability to calculate Auto-Z, Auto would change to either Matl or Sens.
Matl has the same meaning as described above,
Sens indicates the last calculated Auto-Z value (prior to failure) is used for
thickness calculations for this sensor.
The IC6 determines to use Matl or Sens depending on the frequency of the
fundamental resonance. If the fundamental frequency closely matches the last
valid fundamental frequency prior to Auto-Z failure, the IC6 will use the Sens
value. Otherwise the IC6 will use the Matl value.