INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
RATE RAMP 2
Sets the logic condition to be true at the beginning of Rate Ramp 2. The
condition remains true until the end of Rate Ramp 2. The condition is also
cleared when entering the Manual state, and when a STOP/RESET or a
STOP/START sequence is executed.
READY
Sets the logic condition to be true as long as the IC6 is in the READY state. The
condition remains true until a START command is received or when entering
Manual State.
RISE 1
Sets the logic condition to be true at the start of Rise Time 1. The condition
remains true until the end of the Rise Time 1. The condition is also cleared
when entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
NOTE: This state, PRECOND RISE, PRE-COND SOAK, and SOAK 1 are
skipped if the same material was used in a previous layer and has a
non-zero Idle power. The next layer using this material will immediately
proceed to the Rise 2 state.
RISE 2
Sets the logic condition to be true at the start of Rise Time 2. The condition
remains true until the end of Rise Time 2. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
SENSOR #
Sets the logic condition to be true whenever a Layer containing the Sensor # is
in the READY state, or when it is STARTed. The condition remains true until a
layer containing a material that does not use this Sensor #, is STARTed or
placed in the READY state, or until a Crystal Switch on a dual sensor head is
done. Numeric inputs range from 1 through 8.
SHUTTER DELAY
Sets the logic condition to be true at the start of Shutter Delay. The condition
remains true until the end of Shutter Delay. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
S
HTTR
D
LY
E
RROR
Sets the logic condition to be true when a Shutter Delay Error condition occurs.
The condition remains true until a START or a RESET command is received.