4 query general parameter, 5 update general parameter, 6 query material parameter – INFICON IC6 Thin Film Deposition Controller User Manual
Page 223: 7 update material parameter, 8 query sensor parameter
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IC6 Operating Manual
10.4.35.4 Query General Parameter
Active Process (1)
Command Format: QG <Command ID>
QG1
Command QG1 = 030051470199
Response: 07000019060200000021
10.4.35.5 Update General Parameter
Active Process (1), Make Process 2 active
Command Format: UG <Command ID> <Paramter Value>
UG1 2
Command UG1 2: 0700554701020000009F
Response: 030000C506CB
10.4.35.6 Query Material Parameter
Z-Ratio (2), Material 1
Command Format: QM <Command ID> <Material Number>
QM2 1
Command QM2 1: 0400514D0201A1
Response: 070000F10648E1BA3E18
10.4.35.7 Update Material Parameter
Control Loop (4), Material 1, PID (2)
Command Format: UM <Command ID> <Material Number> <Parameter Value>
UM4 1 2
Command UM4 1 2: 0800554D040102000000A9
Response: 0300000D0613
10.4.35.8 Query Sensor Parameter
Shutter Output (1), Sensor 1
Command Format: QS <Command ID> <Sensor Number>
QS1 1
Command QS1 1: 040051530101A6
Response: 0700008706000000008D