INFICON IC6 Thin Film Deposition Controller - Manual (Page 186)

10 - 16
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
24
(0x18)
DAC 1 Scale 0.1/ 10.0/
10.0
REAL_3X1 Update not allowed if
process is running.
25
(0x19)
DAC 2 Scale
26
(0x1a)
DAC 3 Scale
27
(0x1b)
DAC 4 Scale
28
(0x1c)
DAC 5 Scale
29
(0x1d
DAC 6 Scale
30
(0x1e)
DAC 7 Scale
31
(0x1f)
DAC 8 Scale
32
(0x20)
DAC 9 Scale
33
(0x21)
DAC 10 Scale
34
(0x22)
DAC 11 Scale
35
(0x23)
DAC 12 Scale
Table 10-6 General parameters (continued)
QG UG
Cmd ID
Name
(Units)
Range:
Low
Limit/
High
Limit/
Default
Data Type
Notes
Update Restrictions
and Display Notes