9 update sensor parameter, 10 query source parameter, 11 update source parameter – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
10.4.35.9 Update Sensor Parameter
Sensor Type (2), Sensor 1, CrystalTwo (1)
Command Format: US <Command ID> <Sensor Number> <Parameter Value>
US2 1 1
Command US2 1: 08005553020101000000AC
Response: 0300002F0635
10.4.35.10 Query Source Parameter
Shutter Output (2), Source 1
Command Format: QC <Command ID> <Source Number>
QC2 1
Command QC2 1: 04005143020197
Response: 0700003F060000000045
10.4.35.11 Update Source Parameter
Number of crucibles (3), Source 1, 4 crucibles (1)
Command Format: UC <Command ID> <Source Number> <Parameter Value>
UC3 1 1
Command UC3 1 1: 080055430301010000009D
Response: 03000054065A
10.4.35.12 Query Process Layer Parameter
Process 1, Layer 1
Command Format: QP <Command ID> <Process Number> <Layer Number>
QP1 1 1
Command QP1 1 1: 05005150010101A4
Response: 0700002A060300000033