INFICON IC6 Thin Film Deposition Controller - Manual (Page 162)

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IC6 Operating Manual
SOAK 1
Sets the logic condition to be true at the start of Soak Time 1. The condition
remains true until the end of Soak Time 1. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
SOAK 2
Sets the logic condition to be true at the start of Soak Time 2. The condition
remains true until the end of Soak Time 2. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
SOURCE #
Sets the logic condition to be true whenever a Layer containing Source # is in
the READY state, or when it is STARTed. The condition remains true until a
Layer containing a Material with a different Source # is STARTed or placed in
the READY state. Numeric inputs range from 1 through 6.
STATEMENT ###
This Event can be used to test a logic statement transition and the appropriate
Action is taken when the statement designated becomes true. A true statement
is indicated by three small asterisks below the statement number. Numeric
inputs range from 1 through 100.
STOP
Sets the logic condition to be true as long as the IC6 is in STOP. The condition
remains true until a RESET or a START command is received.
SUSPEND
Sets the logic condition to be true as long as the IC6 is in SUSPEND. The
condition remains true until a START command is received.
TEST
Sets the condition to be true when the IC6 is in TEST.
THICK LIMIT
Sets the logic condition to be true once the Thickness Limit is achieved while
in Deposit. The condition remains true until entering the IDLE state for that
Layer or until a Zero Thickness or a STOP/RESET sequence is executed.
THICK SUM # ###
Sets the logic condition to be true when the sum of thickness indicated by the
designated Thickness Equation #, 1 to 3, reaches the thickness value ###
(0-999.9) kЕ.