INFICON IC6 Thin Film Deposition Controller - Manual (Page 210)

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IC6 Operating Manual
10.4.30 Status General
Command = SG <Command ID><Option>
Command ID = <Byte> See Description in Table 10-12 .
Option = <Byte> |< Integer > | <32 Bit Word> | <48 Bit Word>
Response = <Byte>… <Byte> | <Integer>…<Integer
Table 10-12 Status general commands
SG
Comm
and ID Description Option
Number of
bytes in
the
response
Data Returned Notes
0
(0x00)
N/A
1
(0x01)
Active process 4 <Integer>
2
(0x02)
Active layer(s) 1 to 7 <Byte>[<Byte>]
[<Byte>]…[<Byte>]
First byte is number of
active layers. The
following bytes are which
layer(s) is (are) active
3
(0x03)
Output status 5 <Byte><Byte><Byte>
<Byte><Byte> Each bit
represents an output, bit
set means output active.
MSB of first byte is output
1.MSB of the fifth byte is
output 33.
4
(0x04)
Input status 4 <Byte><Byte><Byte>
<Byte> Each bit
represents an input. Bit
set means input active.
MSB of first byte is input 1.
MSB of the fourth byte is
input 25.
5
(0x05)
Logic statement
status
13 <Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte> Each bit
represents a logic
statement, bit set means
logic statement is true.
MSB of first byte is logic
statement 1.MSB of the
thirteenth byte is logic
statement 97.
6
(0x06)
Status Messages 8 <Byte><Byte><Byte>
<Byte><Byte><Byte>
<Byte><Byte>
See encodes in section
15.1 on page 15-1 . One bit
is set for each error.
Multiple bits may be set.