INFICON IC6 Thin Film Deposition Controller - Manual (Page 283)

15 - 13
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Crucible Switch Fail Crucible switch fail while in Source
Maintenance. The message is
removed from
the screen on
any key press or
if another
transient
message
appears Source
Maintenance Not
available
from
Remote
Comm
Invalid Calibration Value Cross Talk Calibration value is out of
range.
Cross Talk
Calibration * Not
Available
Xtal Fail in Calibration Crystal failure in Calibration Cross Talk
Calibration Not
Available
from
Remote
Comm
Start Inhibited A Start is issued while Start Inhibit is active. All 69
* Remote communications are not permitted while in source Maintenance.
Table 15-5 Transient messages (continued)
Transient Message Set Clear Screen Remote
Comm.
Encodes