INFICON IC6 Thin Film Deposition Controller - Manual (Page 89)

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IC6 Operating Manual
A crystal switch will automatically occur when:
 The IC6 is configured for a XtalTwo (CrystalTwo) sensor type, a layer is
STARTed or running and there is another good crystal available when the
active crystal fails.
 The IC6 is configured for a XtalSix, Xtal12 or Generic, a layer is STARTed or
running, and there is at least one good crystal left in the carousel when the
active crystal fails.
 A layer is configured with a Backup sensor, a layer is running on the primary
sensor, and the last crystal of the primary sensor fails.
 The IC6 is configured for a XtalTwo or single head with Backup, a START is
executed and the designated primary sensor is different from the last sensor
run.
 Using a XtalSix or Xtal12 and pressing START if the current position is not
within the First/Last Xtal position range listed on the Sensor page of the
Material screen.
 S & Q levels are exceeded while in deposit.
A crystal switch will NOT automatically occur:
 During a state of STOP, READY or IDLE.
 When the designated primary sensor and backup sensor fail during
pre-deposit. (A SUSPEND will occur if the failure action is configured for Time
Power.)
 During deposition if the secondary crystal of a XtalTwo switch fails, or the
Backup sensor, or the last good crystal of a XtalSix, Xtal12 or Generic fails. (In
either case a TIME-POWER, SUSPEND, POST DEPOSIT, or STOP will occur,
depending on the failure option chosen.)
A crystal switch can be manually executed via the front panel, handheld controller,
remote communications, or logic statements when the system is configured for a
multi-position sensor.
NOTE: When crystal switching with the handheld controller, the IC6 must be on
the Sensor Information screen and the cursor on the appropriate sensor
number.
3.6.1.1 XtalTwo (CrystalTwo)
In the case of the XtalTwo (a Dual Sensor head with a 779-220-G1 or 779-220-G2
XTAL 2 Switch), the CrystalSwitch output must be wired so that it simultaneously
energizes the Pneumatic Shutter Actuator Control Valve which applies the air
pressure to actuate the dual sensor shutter mechanism and the RF relay in the
XTAL 2 Switch, exposing crystal #2 while covering crystal #1 and rerouting the RF
signal. This allows the dual sensor to be operated with only one oscillator kit and
requires only one sensor connection at the IC6.