INFICON IC6 Thin Film Deposition Controller - Manual (Page 109)

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IC6 Operating Manual
Chapter 5
Material Setup
5.1 Introduction
The IC6 can store definition parameters for up to 32 materials. Each layer in a
Process references one of these materials by its number, ranging from
1 to 32. Any material that is to be used must be defined. Materials can be defined
by referencing the internal Material Library containing more than two hundred
cataloged materials and by completing a series of parameter entries at the front
panel.
Material Setup is initiated by moving the cursor to the Material heading on the Main
Menu and pressing MENU. To return to the Main Menu screen, press MENU again.
5.1.1 Material Screen Overview Page
The Material Overview display, see Figure 5-1 , shows all 32 available materials.
Materials are initially shown as Material 1 to Material 32. Use the right arrow cursor
to move into the material table. Material parameters can be copied from one
material number to others for quick duplication using F2 Copy Material and
F3 Paste Material
Figure 5-1 Material overview display
With the cursor on one of the 32 materials, press F1 Select Material. See Figure
5-3 on page 5-3 . The screen changes to show the Material screen. To assign one
of the chemical formulas with its correct density and Z-Ratio values to this material
#, move the cursor to the appropriate library display: Lib A-Hf, Lib Hf-Sc or Lib Sc-Z.