INFICON IC6 Thin Film Deposition Controller - Manual (Page 220)

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IC6 Operating Manual
10.4.34 Remote Layer Action
Command = RL <Command ID> <Layer Number> (<Action Value>)
Command ID = <Byte>.
Layer Number = <Byte> 0 - 200
If Zero is given as the layer number then the remote action will be for the active
layer. If more then one layer an error will be returned.
Action Value = <Byte> | <Integer> | <Float>
See Table 10-16 for commands that require an action value.
Response = None (Just header and trailer)
Table 10-16 Remote layer
RL
Command
ID
Meaning
Action
Value
Notes
0 (0x00) Suspend Cannot be done from Idle
1 (0x01) Zero Thickness Cannot do from Suspend
2 (0x02) Start Deposit Will always zero thickness on entry.This cannot be done from
Ready, Idle,Stop, Suspend, Crystal Switching or Crucible Switch.
When there is no good crystal, this command will go to "Time
Power" if the previous state was Non-Deposit Hold, otherwise, is not
allowed.
3
(0x03)
Go to Non-Deposit
Control
This cannot be done from Ready, Stop, Suspend or Crucible Switch.
When there is no good crystal, this command will go to Non-Deposit
Hold if the previous state was Time Power, otherwise, is not allowed.
4 (0x04) Go to Post-Deposit
(Feed Ramp)
Cannot be done if in Crucible Switch
5
(0x05)
Continue Deposit Go to Deposit, but don't zero thickness.This cannot be done from
Ready, Idle, Stop, Suspend, Crystal Switching or Crucible
Switch.When there is no good crystal, this command will go to Time
Power if the previous state was Non-Deposit Hold, otherwise, is not
allowed.
6
(0x06)
Go to Manual. (Source shutter does not change position) Cannot be done if in
STOP, Suspend or Crucible Switch, or there is not a good crystal.
7
(0x07)
Set Power Level <Float> Range is 0-99.99. Only allowed if in Manual, Time Power, or
Non-Deposit Hold State. If the value is greater than the Max Power
or less than the Min Power, a value error is returned.
8
(0x08)
Open Source shutter Only allowed if in Manual