INFICON IC6 Thin Film Deposition Controller - Manual (Page 327)

A - 3
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
54 Cr
3
C
2
6.680 *1.000 chromium carbide
55 CrB 6.170 *1.000 chromium boride
56 Cs 1.870 *1.000 cesium
57 Cs
2
SO
4
4.243 1.212 cesium sulfate
58 CsBr 4.456 1.410 cesium bromide
59 CsCI 3.988 1.399 cesium chloride
60 CsI 4.516 1.542 cesium iodide
61 Cu 8.930 0.437 copper
62 Cu
2
O 6.000 *1.000 copper oxide
63 Cu
2
S 5.600 0.690 copper (I) sulfide (alpha)
64 Cu
2
S 5.800 0.670 copper (I) sulfide (beta)
65 CuS 4.600 0.820 copper (II) sulfide
66 Dy 8.550 0.600 dysprosium
67 DY
2
O
3
7.810 *1.000 dysprosium oxide
68 Er 9.050 0.740 erbium
69 Er
2
O
3
8.640 *1.000 erbium oxide
70 Eu 5.260 *1.000 europium
71 EuF
2
6.500 *1.000 europium fluoride
72 Fe 7.860 0.349 iron
73 Fe
2
O
3
5.240 *1.000 iron oxide
74 FeO 5.700 *1.000 iron oxide
75 FeS 4.840 *1.000 iron sulfide
76 Ga 5.930 0.593 gallium
77 Ga
2
O
3
5.880 *1.000 gallium oxide (B)
78 GaAs 5.310 1.590 gallium arsenide
79 GaN 6.100 *1.000 gallium nitride
80 GaP 4.100 *1.000 gallium phosphide
81 GaSb 5.600 *1.000 gallium antimonide
82 Gd 7.890 0.670 gadolinium
83 Gd
2
O
3
7.410 *1.000 gadolinium oxide
84 Ge 5.350 0.516 germanium
85 Ge
3
N
2
5.200 *1.000 germanium nitride
86 GeO
2
6.240 *1.000 germanium oxide
87 GeTe 6.200 *1.000 germanium telluride
88 Hf 13.090 0.360 hafnium
89 HfB
2
10.500 *1.000 hafnium boride
Table A-1 Material table (continued)
Code Formula Density Z-Ratio Material Name