INFICON IC6 Thin Film Deposition Controller - Manual (Page 28)

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IC6 Operating Manual
1.4.3 IC6 Features
1.4.3.1 Recipe Storage & Datalogging
USB Memory Device
1.4.3.2 Sensor Parameters
Up to 8 sensors can be averaged together
(Sensor) Shutter Output . . . . . . . . . . 0 to 38
Sensor Type . . . . . . . . . . . . . . . . . . . Single, XtalTwo, XtalSix, Xtal12, Generic
(Sensor) Switch Output . . . . . . . . . . 0 to 38
Auto-Z . . . . . . . . . . . . . . . . . . . . . . . Yes/No
# of Positions (for Generic Sensor type) . . . . . . . . . 1 to 12
# of Pulses (for Generic Sensor type) . . . . . . . . . . . 1 to 10
Pulse On (Time for Generic Sensor type) . . . . . . . . 0.1 to 9.9 s
Pulse Off (Time for Generic Sensor type) . . . . . . . . 0.1 to 9.9 s
Recorder Output. . . . . . . . . . . . . . . . 0 to 12
Recorder Function . . . . . . . . . . . . . . Rate, Thickness, RateDeviation
Recorder Range. . . . . . . . . . . . . . . . 0 to 99999
1.4.3.3 Source Parameters
Up to 6 sources may be controlled at the same time
DAC Output . . . . . . . . . . . . . . . . . . . 0 to 12
(Source) Shutter Output . . . . . . . . . . 0 to 38
Crucible Selection . . . . . . . . . . . . . . Turret is indexed to selected position on a
Start. Turret feedback is checked whenever a
source is started. Range is from 1 to number
of crucibles.
Number of Crucibles. . . . . . . . . . 1, 4, 8, 16, 32 or 64
Crucible Output . . . . . . . . . . . . . 0 to 38
Turret Feedback . . . . . . . . . . . . . Yes / No
Turret Input. . . . . . . . . . . . . . . . . 0 to 28
Turret Delay . . . . . . . . . . . . . . . . 2 to 180 s (Time-out period with feedback,
delay time without feedback)