INFICON IC6 Thin Film Deposition Controller - Manual (Page 165)

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IC6 Operating Manual
GO TO NONDEP ## . . . . . . . . . . . . 0 (any material) to 32
Places the layer that uses the designated Material ## into the Non-Deposit
Control state. Thickness is not incremented. This cannot be done from the
Ready, Idle, Stop, Suspend, or Crucible Switch states. If the crystal is failed,
this action will place the Channel into the Non-Deposit Hold state if the previous
state was Time Power, otherwise it is not allowed.
GO TO POST DEP ## . . . . . . . . . . . 0 (any material) to 32
This action places the designated Material ## into the Idle Ramp state. This
action cannot be done if in Crucible Switch.
INCREMENT COUNT ## . . . . . . . . . 1 to 20
Increases the count by one in the designated counter ##.
MESSAGE (ON/OFF) ## . . . . . . . . . 1 to 10
Designates the user-defined message ## and displays the message on the
screen (or removes it from being displayed). The message is displayed in the
message section of the display. Messages are defined in the General/ Message
page.
PRE COND SOAK HOLD (ON/OFF) ##0 (any material) to 32
If active (ON), the designated Material ## will pause execution and maintain
PreCondition power until Pre Cond Soak Hold is turned OFF. Commands from
Remote Comm and Logic will be independent.
RESET
This action is identical to pressing the RESET button on the front panel.
RWS INHIBIT (ON/OFF) ## . . . . . . . 0 (Any Material) to 32
When active (ON), this will prevent the designated Material ## from exiting the
RateWatcher Hold state. If Sample is already active, remains in Sample until
Accuracy requirement is met. When OFF, RateWatcher Sample will be
enabled. Commands from Remote Comm and Logic will be independent.
RWS INITIATE (ON/OFF) ## . . . . . . 0 (any material) to 32
When active (ON), this will start the RateWatcher sampling interval for the
designated Material ##. When OFF, RateWatcher sampling will take place at
the programmed interval based on the RateWatcher time unless RWS INHIBIT
is on. Commands from Remote Comm and Logic will be independent.
SELECT PROCESS # . . . . . . . . . . . 1 to 50
This action selects which Process # is to be the Active Process. The value
entered must correspond to a defined Process. If the IC6 is already executing
a Process, that is, not in Ready or Idle of last layer in process when this Action
is activated, the Action is ignored.