INFICON IC6 Thin Film Deposition Controller - Manual (Page 201)

10 - 31
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
66
(0x42)
Sensor 1 Weight
(%)
1/
400.0/
100.0
REAL_4X1 Visible only if Multipoint is
set to Yes
Gray font is Failure Action
= 0 (not used)
67
(0x43)
Sensor 2 Weight
(%)
68
(0x44)
Sensor 3 Weight
(%)
69
(0x45)
Sensor 4 Weight
(%)
70
(0x46)
Sensor 5 Weight
(%)
71
(0x47)
Sensor 6 Weight
(%)
72
(0x48)
Sensor 7 Weight
(%)
73
(0x49)
Sensor 8 Weight
(%)
74
(0x4a)
Sensor 1 Tooling
(%)
1.0/
999.9/
100.0
REAL_4X1 Visible only if Multipoint is
set to Yes
Gray font is Failure Action
= 0 (not used)
75
(0x4b)
Sensor 2 Tooling
(%)
76
(0x4c)
Sensor 3 Tooling
(%)
77
(0x4d)
Sensor 4 Tooling
(%)
78
(0x4e)
Sensor 5 Tooling
(%)
79
(0x4f)
Sensor 6 Tooling
(%)
80
(0x50)
Sensor 7 Tooling
(%)
81
(0x51)
Sensor 8 Tooling
(%)
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes