INFICON IC6 Thin Film Deposition Controller - Manual (Page 187)

10 - 17
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
36
(0x24)
DAC 1 Polarity 0/ 1/ 1 Encode 0 = Negative
1 = Positive
Update not allowed if
process is running.
37
(0x25)
DAC 2 Polarity
38
(0x26)
DAC 3 Polarity
39
(0x27)
DAC 4 Polarity
40
(0x28)
DAC 5 Polarity
41
(0x29)
DAC 6 Polarity
42
(0x2a)
DAC 7 Polarity
43
(0x2b)
DAC 8 Polarity
44
(0x2c)
DAC 9 Polarity
45
(0x2d)
DAC 10 Polarity
46
(0x2e)
DAC 11 Polarity
47
(0x2f)
DAC 12 Polarity
48
(0x30)
Source DAC
Required
0/ 1/ 1 Encode 1 = Yes
0= No
Table 10-6 General parameters (continued)
QG UG
Cmd ID
Name
(Units)
Range:
Low
Limit/
High
Limit/
Default
Data Type
Notes
Update Restrictions
and Display Notes