INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
FEED RAMP
Sets the logic condition to be true at the start of Feed Ramp. The condition
remains true until the end of Feed Ramp. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
FINAL THICK
Sets the logic condition to be true once the Final Thickness is achieved while
in Deposit or Manual or when the Final Thickness Trigger action is activated.
The condition remains true until the Layer which has achieved Final Thickness
enters the IDLE state, or until a Zero Thickness or a STOP/RESET sequence
is executed.
IDLE
Sets the logic condition to be true at the beginning of the Idle state. The
condition remains true until the end of Idle. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
NOTE: If Auto Start Next is enabled, this logic event is only triggered at the End
of Process and not between each subsequent layer.
IN DEPOSIT
Sets the logic condition to be true at the beginning of the Deposit state and
includes Time-Power and Rate Ramps. It is also true while in Manual and the
Source/Substrate shutter output is active. The condition is cleared when
entering the post-deposit state, or when a STOP/RESET or a STOP/START
sequence is executed.
IDLE RAMP
Sets the logic condition to be true at the start of Idle Ramp. The condition
remains true until the end of Idle Ramp. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
ION ASSIST DEP
Sets the logic condition to be true at the start of Deposit if Ion Assist Deposit
has been enabled for this material. The condition remains true until the end of
Deposit. The condition is also cleared when entering the Manual state, and
when a STOP/RESET or a STOP/START sequence is executed
LAST LAYER
Sets the logic condition to be true at the beginning of the Last Layer defined for
the active process. The condition remains true until the last Layer enters the
IDLE state.