INFICON IC6 Thin Film Deposition Controller - Manual (Page 120)

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IC6 Operating Manual
NOTE: After a crystal fails due to exceeding the Counts value, the
Crystal Fail can be cleared by installing a new crystal or
pressing the F3 key to Clear S & Q counts on the Sensor
Information screen. This action must be repeated for each
sensor used by cursoring to the appropriate sensor number.
STABILITY SINGLE . . . . . . 0 Hz and 25 to 9999 Hz (Values 1 to 24 are
not allowed)
This sets the maximum permissible increase in frequency from one
measurement to the next that will cause a crystal fail. The default value
is 0 Hz which disables the function.
STABILITY TOTAL . . . . . . . 0 Hz and 25 to 9999 Hz (Values 1 to 24 are
not allowed)
This sets the maximum total permissible increase in frequency
accumulated during the active layer that will cause a crystal fail. The
default value is 0 Hz which disables the function.
NOTE: After a crystal fails due to exceeding the allowable Hz value,
the Crystal Fail can be cleared by installing a new crystal or
pressing the F3 key to Clear S & Q counts on the Sensor
Information screen. This action must be repeated for each
sensor used by cursoring to the appropriate sensor number.
5.1.5 Pre/Post Screen Deposit Page Parameters
MATERIAL NUMBER . . . . . . . . . . . 1 to 32
Change the number to edit or create a different material
NOTE: The first power ramp consisting of Pre-Cond Rise and Pre-Cond Soak is
skipped if the previous layer had the same source, same crucible and its
Idle power is nonzero.
PRECON SOAK POWER . . . . . . . . 0.00 to 99.99%
This parameter is usually set to the power level at which the source material
just begins to glow. The IC6 ramps the power level from zero to Pre-Cond Soak
Power linearly over the time period Pre-Cond Rise Time. The default value is 0.
PRECON RISE TIME. . . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period over which the source power is
ramped from 0 to Pre-Cond Soak Power. The default values is 00:00.
PRECON SOAK TIME. . . . . . . . . . . 00:00 to 99:59 min:s
This parameter provides the time period for which the IC6 holds at
Precon Soak Power. The default value is 00:00.