INFICON IC6 Thin Film Deposition Controller - Manual (Page 197)

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IC6 Operating Manual
10
(0x0a)
Minimum Power
(%)
0.00/ 99.98/
0.0
REAL_4X2
11
(0x0b)
Max Power Option 0/ 3/ 2 Encode 0 = Continue
1 = Post-Dep
2 = Stop Proc
3 = Suspend Mat
12
(0x0c)
PreCond Soak Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
13
(0x0d)
PreCond Rise Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
Time Note: Times are
displayed as mm:ss. Times are
stored as seconds.
The maximum number of
seconds is 5999. This would
be displayed as 99:59.
14
(0x0e)
PreCond Soak Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
15
(0x0f)
Soak Power 1
%
0.0/ 99.99/
0.0
REAL_4X2
16
(0x10)
Rise Time 1
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
17
(0x11)
Soak Time 1
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
18
(0x12)
Soak Power 2
%
0.0/ 99.99/
0.0
REAL_4X2
19
(0x13)
Rise Time 2
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
20
(0x14)
Soak Time 2
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
21
(0x15)
Auto Soak 2 0/ 1/ 0 Encode 0 = No
1 = Yes
22
(0x16)
Dep After Pre-Dep 0/ 1/ 1 Encode 0 = No
1 = Yes
23
(0x17)
Delay Option 0/ 3/ 0 Encode 0 = None, 1 = Shutter
2 = Control, 3 = Both
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes