INFICON IC6 Thin Film Deposition Controller User Manual
Page 192
10 - 22
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Soak 1
0X4B
0xB5
Rise 2
0x4C
0xB4
Soak 2
0x4D
0xB3
Shutter Delay
0x4E
0xB2
Deposit
0x4F
0xB1
Rate Ramp 1
0x50
0xB0
Rate Ramp 2
0x51
0xAF
Manual
0x52
0xAE
Time Power
0x53
0xAD
Non-Dep Control
0x54
0xAC
Non-Dep Hold
0x55
0xAB
Feed Ramp
0x56
0xAA
Feed 0x57
0xA9
Idle Ramp
0x58
0xA8
Idle
0x59
0xA7
Suspend
0x5A
0xA6
Stop 0x5B
0xA5
Final Thick
0x5C
0xA4
Thick Limit
0x5D
0xA3
Thick Sum XXX
See Note 4
Equation #
1
3
Thickness
xxx.xxx
0
999.9
0x5E
0xA2
Time Limit
0x5F
0xA1
Process XXX
Process #
1
50
0x60
0xA0
Layer XXX
Layer #
1
200
0x61
0x9F
Material XXX
Material #
1
32
0x62
0x9E
Sensor XXX
Sensor #
1
8
0x63
0x9D
Source XXX
Source #
1
6
0x64
0x9C
Layer End XXX
Layer #
0 = Any
0
200
0x65
0x9B
Material End XXX Material #
0 = Any
0
32
0x66
0x9A
Table 10-7 Event list (continued)
Events
1st
numeric
(1 Byte)
(XXX)
Min Max
2nd
numeric
(Integer)
(YYY)
Min
Max
Logic
Code
Logic
Code
Negated