A - 6 – INFICON IC6 Thin Film Deposition Controller User Manual
Page 330
A - 6
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
162
PbSnO
3
8.100
*1.000
lead stannate
163
PbTe
8.160
0.651
lead telluride
164
Pd
12.038
0.357
palladium
165
PdO
8.310
*1.000
palladium oxide
166
Po
9.400
*1.000
polonium
167
Pr
6.780
*1.000
praseodymium
168
Pr
2
O
3
6.880
*1.000
praseodymium oxide
169
Pt
21.400
0.245
platinum
170
PtO
2
10.200
*1.000
platinum oxide
171
Ra
5.000
*1.000
radium
172
Rb
1.530
2.540
rubidium
173
RbI
3.550
*1.000
rubidiurn iodide
174
Re
21.040
0.150
rhenium
175
Rh
12.410
0.210
rhodium
176
Ru
12.362
0.182
ruthenium
177
S
8
2.070
2.290
sulfur
178
Sb
6.620
0.768
antimony
179
Sb
2
O
3
5.200
*1.000
antimony trioxide
180
Sb
2
S
3
4.640
*1.000
antimony trisulfide
181
Sc
3.000
0.910
scandium
182
Sc
2
O
3
3.860
*1.000
scandium oxide
183
Se
4.810
0.864
selenium
184
Si
2.320
0.712
silicon
185
Si
3
N
4
3.440
*1.000
silicon nitride
186
SiC
3.220
*1.000
silicon carbide
187
SiO
2.130
0.870
silicon (ii) oxide
188
SiO
2
2.648
1.000
silicon dioxide
189
Sm
7.540
0.890
samarium
190
Sm
2
O
3
7.430
*1.000
samarium oxide
191
Sn
7.300
0.724
tin
192
SnO
2
6.950
*1.000
tin oxide
193
SnS
5.080
*1.000
tin sulfide
194
SnSe
6.180
*1.000
tin selenide
195
SnTe
6.440
*1.000
tin telluride
196
Sr
2.600
*1.000
strontium
197
SrF
2
4.277
0.727
strontium fluoride
Table A-1 Material table (continued)
Code
Formula
Density
Z-Ratio
Material Name