INFICON IC6 Thin Film Deposition Controller - Manual (Page 237)

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IC6 Operating Manual
11.2 Trend Analysis
Along with multiple sensor monitoring and control of the deposition process, the
IC6 allows rate and thickness information from individual quartz crystal sensors to
be output to the Digital-to-Analog (DAC) outputs. This enables mapping of an
individual sensor's information, which is useful in monitoring the change in source
flux distribution during the deposition process.
11.2.1 IC6 Parameters Associated with the Trend Analysis Feature
RECORDER OUTPUT . . . . . . . . . . . 0 to 12
This parameter designates which of the DAC outputs is to be used as a
recorder output. 0 indicates there is not a DAC identified with this particular
material. Values 1 through 6 correspond to the six DAC BNC outputs on the
back of the IC6 labeled DAC 1 to DAC 6. DAC outputs 7 to 12 require the
optional DAC outputs card.
SENSOR RECORDER FUNCTION . Rate/Thick/RateDev
This parameter determines the function of the Sensor’s recorder output.
Default is Rate. Note: Rate Filter Time has no effect.
RECORDER RANGE. . . . . . . . . . . . 0 to 99999
The full scale range value selected corresponds to 10 V at the DAC output.
Default value is 100.
NOTE: A recorder output cannot be associated with a DAC that is configured
as a Source output. An error message will be displayed if this is
attempted.