INFICON IC6 Thin Film Deposition Controller - Manual (Page 250)

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IC6 Operating Manual
12.5.2 AutoTune Parameters
MATERIAL INDEX. . . . . . . . . . . . . . 1 to 32
This parameter is used to select the Material that is to be AutoTuned. Values
range from 1 to 32. The default value is 1.
DESIRED RATE . . . . . . . . . . . . . . . 0.001 to 999.9 Å/s
For a Complete Tune, this parameter determines the Rate for which the
AutoTuned control loop parameters will be calculated. For Quick Tune this
parameter is ignored. Values range from 0.001 to 999.9 Å/s. The default value
is 10.0 Å/s.
MAXIMUM RATE. . . . . . . . . . . . . . . 0.002 to 999.9 Å/s
This parameter is used to set the maximum deposition Rate allowed during an
AutoTune session. The events which occur upon exceeding this value are
dependent upon whether a Quick Tune or a Complete Tune is designated. The
range of values permitted for this parameter is dependent on the value chosen
for the Desired Rate. The maximum allowed value will always be 999.9 Å/s.
The minimum allowed value is 2 times the Desired Rate value.
TUNE TYPE . . . . . . . . . . . . . . . . . . . Quick/Complete
This parameter is used to choose between a Quick Tune and a Complete Tune
described in
section 12.5.5 .The default value is Quick.
MATERIAL NAME
This is a read-only parameter that identifies the material being deposited.
CONTROL LOOP
This is a read-only parameter that indicates the type of control loop specified
during material definition. It has no effect during Auto Tune. The type can be
Non-PID, PI or PID.
PROCESS GAIN
This is a read-only parameter that represents the rate of change of % source
power for a given rate deviation. It has no effect during Auto Tune.
TIME CONSTANT
This is a read-only parameter that represents the source's time constant. It is
valid only for a PI or PID control loop and has no effect during Auto Tune.
DEAD TIME
This is a read-only parameter that represents the source's lag time. It is valid
only for a PI or PID control loop and has no effect during Auto Tune.