INFICON IC6 Thin Film Deposition Controller - Manual (Page 86)

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IC6 Operating Manual
3.5 State Descriptions
Table 3-2 State descriptions
STATE CONDITION RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter Sensor
Shutter
1. READY The IC6 will accept a START command. Inactive Inactive 0
2. CRUCIBLE SWITCH
(Crucible Sw)
During this state, the crucible turret is
being moved from its current position to the
one called out for the given material. If the
idle power of the source in use is not zero
the power is set to zero before the crucible
position changes. IC6 advances to next
state when turret input goes low for the
programmed position or turret delay has
elapsed (depending on parameter
settings). Inactive Inactive 1
3. PRECON RISE Source power rises to Precondition power
level over the precondition rise time.
[PreCon Rise Time] Inactive Inactive 2
4. PRECON SOAK Source is maintained at precondition
power level for the precondition soak time.
[PreCon Soak Time, PreCon Soak Power] Inactive Inactive 3
5. RISE 1 Source is rising to Soak Power 1 level.
[Rise Time 1] Inactive Inactive 4
6. SOAK 1 Source is being maintained at Soak Power
1 level. [Soak Time 1, Soak Power 1] Inactive Inactive 5
7. RISE 2 Source is rising to Soak Power 2 level.
[Rise Time 2] Inactive Inactive 6
8. SOAK 2 Source is being maintained at Soak Power
2 level. [Soak Time 2, Soak Power 2] Inactive Inactive 7
9. SHUTTER DLY Rate is being controlled. Advances to
Deposit State once the Source is in Rate
Control within Shutter Delay Accuracy for 5
seconds. If the transfer sensor has been
set to Yes it will be used during shutter
delay [Delay Option]. Inactive Active 8
10. DEPOSIT Rate control. [Rate, Final Thickness, PID
Control, Process Gain, Primary Time
Constant, System Dead Time] Active Active 9
11. RATE RAMP 1 Rate control, desired rate changing. [New
Rate 1, Start Ramp 1, Ramp Time 1] Active Active 10