INFICON IC6 Thin Film Deposition Controller - Manual (Page 307)

15 - 37
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
15.9.4 Specifications
Dimensions
1.58 in. diameter x 1.79 in.
(40.13 mm diameter x 45.47 mm)
Temperature Range
0 to 50
o
C
Frequency
760-601-G1: 5.5 MHz ± 30 ppm at room temperature
760-601-G2: 5.5 MHz ± 1 ppm at room temperature
Materials
304 Stainless Steel, Nylon, Teflon, brass. Some internal components contain zinc,
tin, and lead.