INFICON IC6 Thin Film Deposition Controller User Manual
Page 274
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IC6 Operating Manual
Source Conflict
When attemting to load two
Codep layers during a reset
and both layers call for the
same source.
After a successful reset.
All
0x0000,0010
0000,0000
Recoder Conflict
A DAC output is set as a
Recorder output on two or
more loaded materials or
sensors.
Conflict has been removed.
All
0x0000,0008
0000,0000
Unable to Auto-Z
X ... X
An active sensor is unable to
Auto-Z. X = sensor
A sensor is no longer active or
is able to Auto-Z. Sensor
Parameter Auto-Z is set to No.
All
0x0000,0004
0000,0000
DAC Error X
DAC monitoring has detected
an error in a DAC used for a
recorder. X = DAC
On Reset
All
0x0000,0002
0000,0000
Testing XIU X
When XIU test begun.
X = Sensor Number
When XIU test finished
Sensor Info
0x0000,0001
0000,0000
Backup Sensor X
The backup sensor is loaded.
X = Material
The backup sensor is no longer
loaded.
0x0000,0000
8000,0000
Backup Delay X
When switching to backup
sensor,, X = Material
After a 5 second delay, when
the backup sensors
measurements start to be used
0x0000,0000
4000,0000
Table 15-1 Status messages (continued)
Status Message
Set
Cleared
Screen
Remote
Comm.
Encode