INFICON IC6 Thin Film Deposition Controller - Manual (Page 111)

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IC6 Operating Manual
5.1.3 Material Screen Source Page Parameters
Figure 5-3 Material source screen
MATERIAL NUMBER . . . . . . . . . . . 1 to 32
Change the number to edit or create a different material.
NAME. . . . . . . . . . . . . . . . . . . . . . . . 15 characters max.
The default will be Material #. The default name is returned as a blank entry
when queried via communications. Materials selected from the library will be
shown by their chemical formula. The Name can be edited using the keys in
cell-phone fashion.
DENSITY . . . . . . . . . . . . . . . . . . . . . 0.100 to 99.999 g/cm
3
This parameter is specific to the material being deposited onto the Crystal. It is
one of two parameters that relate the mass loading on the crystal to a thickness.
If a material is chosen from the Material Library, the density is automatically
entered. The default value is 1.000.
Z-RATIO . . . . . . . . . . . . . . . . . . . . . . 0.100 to 15.000
This parameter is specific to the material being deposited. It is one of two
parameters that relate the mass loading on the crystal to a thickness. If a
material is chosen from the Material Library the Z-Ratio is automatically
entered. The default value is 1.00. This parameter is superseded if
Auto-Z-Ratio is selected in Sensor Setup.